• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a dispensing nozzle (1) for applying a coating to a substrate, comprising a valve seat (16), a valve element (14) which, between a closed position in which it cooperates with the valve seat (16), provides a connection between a coating material inlet (2) and a coating material outlet (3) of the dispensing nozzle (1), and can be moved to an open position in which this connection is open, and further with a retraction element (24), which is between a front position and a can be shifted to the rear position, the retraction element (24) downstream of the valve element (16) being in flow connection with an outlet channel (18) of the outlet nozzle (1).
    公开号:AT521407A2
    申请号:T50544/2019
    申请日:2019-06-18
    公开日:2020-01-15
    发明作者:
    申请人:Suss Microtec Lithography Gmbh；
    IPC主号:
    专利说明:

    Summary
    The invention relates to a dispensing nozzle (1) for applying a coating to a substrate, comprising a valve seat (16), a valve element (14) which, between a closed position in which it cooperates with the valve seat (16), provides a connection between a coating material inlet (2) and a coating material outlet (3) of the dispensing nozzle (1), and can be moved to an open position in which this connection is open, and further with a retraction element (24), which is between a front position and a can be shifted to the rear position, the retraction element (24) downstream of the valve element (16) being in flow connection with an outlet channel (18) of the outlet nozzle (1).
    (Fig. 1) / 19
    A 50544/2019
    The invention relates to a dispensing nozzle for applying a coating to a substrate, in particular to a wafer.
    For the production of semiconductor chips and MEMS, it is known to apply a coating to the substrate (the wafer), which is processed or promotes the processing of the substrate. It is important to apply exactly the desired amount of coating to the surface of the substrate, as tolerances cause the thickness of the coating to be greater or less than it should be. In addition, a drop of the coating material must be prevented from coming off the dispensing nozzle after the completion of the process of applying the coating to the substrate. Such a drop would lead to a clear disturbance of the coating surface, which should be as flat as possible.
    There are several attempts to prevent a drop of coating material from coming off the dispensing nozzle after the coating application is complete. A more widespread approach is to use a vacuum line connected to the dispensing nozzle so that a certain volume of coating material can be "sucked back" into the dispensing nozzle after the coating material process has stopped. This leads to the formation of a so-called meniscus at the outlet of the dispensing nozzle, which prevents a drop from forming there and detaching from the dispensing nozzle.
    The problem with this solution is that an exact metering of the amount of coating material supplied to the substrate is impaired, since it cannot be properly controlled how much coating material is “sucked back” into the dispensing nozzle at the end of the previous coating step, so that an exact metering of the following Coating step to be applied coating material is difficult.
    The object of the invention is to improve the accuracy with which the coating material can be dosed with the dispensing nozzle, and at the same time to reliably prevent a drop of the coating material from unintentionally detaching from the dispensing nozzle after the completion of the dispensing step.
    To this end, the invention provides a dispensing nozzle for applying a coating to a substrate, having a valve seat, a valve element that, between a closed position in which it cooperates with the valve seat, provides a connection between a coating material inlet and a coating material outlet of the dispensing nozzle close, and can be shifted to an open position in which this connection is open, and further with a retraction element that can be shifted between a front position and a rear position, wherein the retraction element
    2.19
    -2- A 50544/2019 downstream of the valve element with an outlet channel of the outlet nozzle in
    There is a flow connection, the retraction element being an intermediate wall which is exposed on one side to the dispensing channel.
    The invention is based on the basic idea of using a retraction element which mechanically “draws back” a certain amount of dispensing material downstream of the valve seat. The retraction element enables a very precise control of the amount of coating material sucked back into the dispensing nozzle at the end of a dispensing step, which simplifies the correct metering of the coating material in the subsequent coating step, since exactly the same amount of coating material can be “added” in the subsequent dispensing step by the retraction element into the front position is moved. An additional advantage is that the suck back is achieved near the front end of the dispensing nozzle. This avoids the problems associated with the prior art approaches in which the suction is at a remote location, which as such is problematic in terms of accuracy and also leads to problems with materials that tend to emit gases. Since an intermediate wall is used as a retraction element, the outlet channel side of the valve element can be sealed in a very simple manner against the “rear side” of the valve element.
    In one embodiment, the retraction element is arranged on the side of the dispensing channel, in particular in a nozzle body of the dispensing nozzle. This position of the retraction element leads to a simple configuration.
    In an alternative embodiment, the retraction element is arranged in the valve element and is in flow connection with the output channel. This configuration enables the dispensing nozzle to be designed with very small dimensions, so that two dispensing nozzles or more can be arranged very close to one another on an application device.
    A very compact configuration can be achieved in that the valve element is in the form of a sleeve, the intermediate wall being clamped on the valve element.
    In order to prevent coating material from contaminating regions of the dispensing nozzle which are not to be exposed to the coating material, a sealing element is provided which seals between the valve element and the nozzle body of the dispensing nozzle.
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    For a reliable connection between the intermediate wall and the valve element without taking up much space, the sealing element can be screwed into the valve element in order to
    Clamp the partition in it.
    In an alternative embodiment, the retraction element is a piston that is exposed on one side to the dispensing channel. Since the piston is rigid, it is possible to control the amount of coating material sucked back into the dispensing nozzle very precisely.
    A retraction control chamber is preferably provided which is operatively connected to the retraction element. The retraction control chamber enables the retraction element to be moved very easily between the front and rear positions by applying different pressure levels to the side of the control element which is exposed to the pressure in the retraction control chamber. For example, applying a first (positive) pressure to the retraction control chamber will result in the retractor being in the forward position, while changing to a second (negative or lower) pressure will cause the retractor to move to the rear position, so that a certain volume of coating material is sucked back into the dispensing nozzle. It may be possible to continue to use the vacuum line and associated controls and control logic of existing dispense valves to control the operation of the retractor or dispenser valve in accordance with the invention.
    In one embodiment, a retraction control piston is provided that is exposed to the pressure in the retraction control chamber. The retraction control piston is an intermediate element between the retraction element and e.g. a vacuum line and ensures that the retraction element is precisely controlled, especially in situations where the retraction element is an intermediate wall or a membrane. The retraction control piston can be mechanically connected to the retraction element.
    An adjustable retraction stop is preferably provided to adjust the maximum stroke of the retraction control piston. The retraction stop allows the amount of coating material sucked back into the dispensing nozzle to be adapted to the special properties of different coating materials, so that regardless of the specific coating material being processed, the “correct” amount of coating material is sucked back at the end of a dispensing step.
    The retraction stop can be a screw or thread, and can be adjusted either manually or remotely using a stepper motor.
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    -4A 50544/2019
    According to a preferred embodiment of the invention, an output control chamber is provided which is operatively connected to the valve element. Similar to controlling the movement of the retraction element, the output control chamber is used to control the position and displacement of the valve element. This can be achieved by changing the pressure level in the output control chamber so that the valve element is pressed against the valve seat when the force acting on the valve element towards the valve seat is higher than the force that acts on the valve element away from the valve seat and vice versa.
    The sealing element is preferably guided on the retraction control piston, so that a radial guide function is provided for the valve element.
    The retraction control piston is preferably screwed onto a projection of the intermediate wall, which leads to a compact, yet reliable connection.
    An adjustable dispensing stop can also be provided for the valve element in order to set the maximum stroke of the valve element. This allows a very simple control for the pressure level in the output control chamber to be used, since the pressure level therein is not needed to control the position of the valve element in the open position. Rather, it is sufficient to use the pressure to displace the valve element between a fixed closed position (defined by the valve seat) and a fixed (yet adjustable) open position defined by the dispensing stop.
    The delivery stop can be in the form of a screw or use a threaded connection which converts a rotation into a translational movement so that the opening stroke of the valve element can be adapted to the specific properties of different coating materials.
    A drive mechanism (such as a stepper motor with a gearbox) may be provided for automatically adjusting the output stop based on control signals.
    The invention will now be described with reference to the accompanying drawings. Show in it
    FIG. 1 shows a schematic cross section of the dispensing nozzle,
    FIG. 2 shows a cross section of the core elements of the dispensing nozzle from FIG. 1,
    FIG. 3 shows the valve element used in the dispensing nozzle in a cross section,
    FIG. 4 shows the valve element from FIG. 3 in a perspective view,
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    - 5A 50544/2019
    FIG. 5 shows the intermediate wall used in the dispensing nozzle in a cross section,
    FIG. 6 shows the intermediate wall from FIG. 5 in a perspective view,
    FIG. 7 shows the sealing element used in the dispensing nozzle in a cross section,
    8 shows the adjustable retraction stop used in the dispensing nozzle in a cross section,
    FIG. 9 shows the adjustable retraction stop from FIG. 8 in a perspective view,
    FIG. 10 shows, on an enlarged scale, a section of the dispensing nozzle in a state in which coating material is dispensed,
    FIG. 11 shows the dispensing nozzle from FIG. 10 in a state in which the dispensing has been interrupted,
    FIG. 12 shows the dispensing nozzle from FIG. 10 in a state in which coating material has been sucked back.
    An output nozzle 1 for applying a coating material to a substrate will now be explained with reference to FIGS. 1 to 9. The dispensing nozzle 1 is particularly suitable for machines which are used for the production of semiconductor chips and MEMS.
    The dispensing nozzle 1 has a nozzle body 10 which is provided with a coating material inlet 2 and a coating material outlet 3. The coating material inlet 2 is connected to a coating material supply via a pipe or any suitable component. The coating material outlet 3 can be in the form of a nozzle or in another configuration which is suitable for applying a special coating material to a substrate.
    A chamber 12 is provided within the nozzle body 10 between the coating material inlet 2 and the coating material outlet 3. Arranged within the chamber 12 is a valve element 14 which can interact with an annular valve seat 16 which is designed such that it surrounds an output channel 18 which acts as a coating material outlet 3.
    The side of the valve seat 16 or the direction towards the valve seat 16 is referred to below as “front”, while the opposite side or direction is referred to as “rear”.
    The valve element 14 can be moved between a closed position and an open position. In the closed position, the valve element 14 touches the valve seat 16 with its front annular end. If the valve element 14 with respect to
    6.19
    -6- A 50544/2019 the valve body 10 is sealed (which is described in detail below), a connection between the coating material inlet 2 and the coating material outlet 3 of the dispensing nozzle 1 is closed in this position of the valve element 14. In the open position, the valve element 14 is (controllably) spaced from the valve seat 16 so that the flow connection between the coating material inlet 2 and the coating material outlet 3 is open. The amount of coating material that is dispensed through the discharge channel 18 with the dispensing nozzle 1 is then dependent on the pressure with which the coating material is supplied, on the viscosity of the coating material and on the stroke of the valve element 14 with which it is discharged from the valve seat 16 was raised.
    The valve element 14 is a hollow sleeve (see in particular FIGS. 3 and 4) which has a tapered and rounded front end face 20 which is suitable for contacting the valve seat 16.
    In its interior, the valve element 14 has a stop 22 for an intermediate wall 24 (see in particular FIGS. 5 and 6), which is arranged in the front section of the valve element 14. Behind the stop 22 (seen from the end face 20), the valve element 14 has an internal thread 26.
    The intermediate wall 24 has a shell-like front membrane 28 and a cylindrical projection 30 which is connected to the center of the membrane 28. A thread 32 is formed on the outer surface of the projection 30.
    The intermediate wall 24 is made of polytetrafluoroethylene (PTFE) or perfluoroalkoxy (PFA). However, other materials can also be used.
    The membrane 28 and the projection 30 are integrally formed here. However, it is also possible to form the projection 30 as a separate part that is subsequently connected to the membrane 28.
    The intermediate wall 24 is attached within the valve element 14 by clamping the outer circumference of the membrane 28 to the stop 22, which is formed in the sleeve-like valve element 14. A sealing element 34 (see FIG. 7) is used for this.
    The sealing element 34 is a hollow, overall sleeve-like body with a guide sleeve 36 at its front end and a sealing bellows 38 at its rear end.
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    -7 - A 50544/2019
    The guide sleeve 36 has an inwardly tapering end face 40, the one
    Forms support surface for the membrane 28 of the intermediate wall 24. On their outer surface is a
    External thread 37 formed.
    At its rear end, the guide sleeve 36 has a control projection 42, which is provided with an external thread 44.
    The guide sleeve 36 and the control projection 42 here form a continuous cylindrical guide surface 46.
    The sealing bellows 38 is provided with an annular connection reinforcement 48, which is used to clamp it on the nozzle body 10.
    The sealing element 34 can consist of the same materials as the intermediate wall 24, in particular of PTFE. However, other materials can also be used.
    By screwing the thread 37 of the guide sleeve 36 into the thread 26 of the valve element 14, the outer periphery of the membrane 28 is clamped at the stop 22. The projection 30 protrudes into the interior of the valve element 14.
    An annular connection reinforcement 48 of the sealing bellows 38 is tightly clamped between two sections of the nozzle body 10, as a result of which the chamber 12 is sealed, so that the valve element 14 is arranged in the chamber “between” the coating material inlet 2 and the valve seat 16. The intermediate wall 24 seals between the chamber 12 and the interior of the valve element 14.
    The displacement of the valve element 14 is controlled with an output control piston 50 which is arranged in an output control chamber 52 formed in the nozzle body 10.
    The output control piston 50 has a connecting projection 51 which has an internal thread at its front end which is screwed onto an external thread 44 which is formed on the control projection 42 of the sealing element 34. Accordingly, any axial displacement of the output control piston 50 is transmitted to the valve element 14 via the sealing element 34. When the output control piston 50 is guided in the nozzle body 10, it provides a guiding effect for the valve element 14.
    The displacement of the output control piston 50 within the output control chamber 52 can be controlled by changing the pressure in the chamber 52. A pressure connection 54 is provided for this purpose (see FIG. 1). A spring 56 is in the
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    -8- A 50544/2019
    Output control chamber 52 is located on the side of the output control piston 50 that is opposite to the side on which the pressure connection 54 is located.
    An adjustable dispensing stop 58 is provided for controlling the maximum displacement of the dispensing control piston 50 in the direction of lifting the valve element 14 from the valve seat 16 (in a rearward direction). The dispensing stop 58 is formed on a screw that extends into the dispensing control chamber 52. By screwing the discharge stop 58 more or less into the discharge control chamber 52, the maximum stroke of the discharge control piston 50 can be adjusted.
    As can be seen in FIG. 2, the discharge stop 58 can be hollow in order to cooperate with a projection formed on the discharge control piston 50 and to achieve a guiding function.
    A seal 60 can be used in a known manner to seal piston 50 from output control chamber 52 and nozzle body 10.
    The output control piston 50 is hollow so that a retraction control chamber 62 is formed therein. A retraction control piston 64 is disposed within the retraction control chamber 62. It is provided with a projection 66 which has a cavity with an internal thread 68 at its front end. The thread 68 is screwed onto the thread 32 of the intermediate wall 24.
    With the retraction control piston 62, the membrane 28 of the intermediate wall 24 can be displaced between a front and a rear position. Because diaphragm 28 serves as one of the limitations of the particular volume of dispensing channel 18 when valve member 14 is in the closed position, retracting diaphragm 28 increases the volume of dispensing channel 18 while a small volume of coating material is withdrawn into dispensing channel 18 when the membrane 28 is retracted. Because of the retraction effect that the membrane 28 of the intermediate wall 24 exerts on the coating material, the intermediate wall 24 is referred to as a retraction element.
    The displacement of the retraction control piston 64 within the retraction control chamber 62 is controlled by changing the pressure in the retraction control chamber 62. A pressure connection 69 is provided for this purpose (see FIGS. 1 and 2). A spring 70 is disposed in the retraction control chamber 62 on the side of the retraction control piston 64 which is opposite to the side on which the pressure connection 69 is arranged.
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    -9- A 50544/2019
    The pressure connection 69 can be formed in a withdrawal stop 72, which is embodied here as a hollow adjusting screw which engages with an external thread 74 in an internal thread 76 which is formed in a rear section of the output control piston 50.
    Accordingly, the retraction stop 72 moves together with the
    Output control piston 50 when the valve element 14 is displaced.
    The retraction control piston 64 can be moved rearward (away from the valve seat 16) until it strikes the retraction stop 72. The corresponding stroke can be set by screwing the retraction stop 72 more or less into the rear section of the output control piston 50.
    For the dispensing of coating material, the valve element 14 is brought into an open state by increasing the pressure in the dispensing control chamber 52 to such an extent that the force of the spring 56 is overcome and the dispensing control piston 50 is moved rearward. Accordingly, the dispensing control piston 50 lifts the valve element 14 from the valve seat 16 via the sealing member 34. In this state, which is shown in FIG. 10, coating material that is supplied via the coating material inlet 2 flows through the chamber 12 and exits through the discharge channel 18 ,
    When coating material is dispensed, the bulkhead 24 is in the forward position. This is done by appropriately controlling the pressure in the retraction control chamber 62.
    When the coating material flow is to be stopped, the pressure in the output control chamber 52 is reduced so that the output control piston 50 is moved forward by the action of the spring 56 and possibly by the pressure level applied to the output control chamber 52 until the valve element 14 abuts the valve seat 16 , The coating material flow is then interrupted. This state is shown in Figure 11
    In order to prevent coating material from dripping from the front end of the dispensing nozzle 1, a small amount of coating material is sucked back into the dispensing channel 18. This is done by moving the retraction element 24 from the front position to the rear position, which is shown in FIG. When the valve element 14 touches the valve seat 16, the displacement of the retraction element 24 (more precisely: the membrane 28) only affects the coating material that is “downstream” of the valve seat 16. Accordingly, the volume sucked back into the front end of the valve element 14 leads to the formation of a small meniscus at the outer end of the discharge channel 18, wherein no coating material can drip from the discharge nozzle 1 onto the substrate to be coated.
    10/19
    -10- A 50544/2019
    权利要求:
    Claims (14)
    [1]
    claims
    1. dispensing nozzle (1) for applying a coating to a substrate, having a valve seat (16), a valve element (14) which, between a closed position in which it cooperates with the valve seat (16), for a connection between a coating material inlet (2) and a coating material outlet (3) of the dispensing nozzle (1), and can be moved to an open position in which this connection is open, and further with a retraction element (24) which is between a front position and a rear position can be displaced, wherein the retraction element (24) downstream of the valve element (14) is in flow communication with an outlet channel (18) of the outlet nozzle (1), the retraction element (24) being an intermediate wall which is on one side for Output channel (18) is exposed.
    [2]
    2. Dispensing nozzle (1) according to claim 1, wherein the retraction element (24) is arranged on the side of the dispensing channel (18), in particular in a nozzle body (10) of the dispensing nozzle (1).
    [3]
    3. Dispensing nozzle (1) according to claim 1, wherein the retraction element (24) is arranged in the valve element (14) and is in flow connection with the dispensing channel (18).
    [4]
    4. dispensing nozzle (1) according to any one of the preceding claims, wherein the valve element (14) is a sleeve, wherein the intermediate wall (24) is clamped to the valve element (14).
    [5]
    5. dispensing nozzle (1) according to any one of the preceding claims, wherein a sealing element (34) is provided which seals between the valve element (14) and the nozzle body (10) of the dispensing nozzle (1).
    [6]
    6. dispensing nozzle (1) according to claim 5 in combination with claim 4, wherein the sealing element (34) is screwed into the valve element (14) and the intermediate wall (24) clamps therein.
    [7]
    7. dispensing nozzle (1) according to one of claims 1 to 3, wherein the retraction element is a piston which is exposed on one side to the dispensing channel (18).
    [8]
    8. dispensing nozzle (1) according to any one of the preceding claims, wherein a retraction control chamber (62) is provided which is operatively connected to the retraction element (24).
    [9]
    The dispensing nozzle (a) of claim 8, wherein a retraction control piston (64) is provided which is exposed to the pressure in the retraction control chamber (62).
    11/19
    -11- A 50544/2019
    [10]
    10. Dispensing nozzle (1) according to claim 9, wherein an adjustable retraction stop (72) is provided for adjusting the maximum stroke of the retraction control piston (64).
    [11]
    11. Dispensing nozzle (1) according to one of claims 9 and 10 in combination with claim 6, wherein the sealing element (34) on the retraction control piston (64) is guided.
    [12]
    12. Dispensing nozzle (1) according to claim 11, wherein the retraction control piston (64) is screwed onto a projection (30) of the intermediate wall (24).
    [13]
    13. dispensing nozzle (1) according to any one of the preceding claims, wherein an output control chamber (52) is provided which is operatively connected to the valve element (14).
    [14]
    14. Dispensing nozzle (1) according to claim 13, wherein an adjustable dispensing stop (58) is provided for adjusting the maximum stroke of the valve element (14).
    12/19
    1.7

    13/19
    2.7
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    同族专利:
    公开号 | 公开日
    KR20190143825A|2019-12-31|
    DE102019116366A1|2019-12-24|
    CN110624768A|2019-12-31|
    AT521407A3|2021-11-15|
    TW202010572A|2020-03-16|
    NL2021163B1|2020-01-06|
    US20190388912A1|2019-12-26|
    JP2019217494A|2019-12-26|
    引用文献:
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    EP2111303B1|2007-01-26|2014-10-15|Haas-Mondomix B.V.|Device and method for dosing foamed compounds|
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    US9346075B2|2011-08-26|2016-05-24|Nordson Corporation|Modular jetting devices|
    US9799539B2|2014-06-16|2017-10-24|Lam Research Ag|Method and apparatus for liquid treatment of wafer shaped articles|WO2019046425A1|2017-08-29|2019-03-07|Henkel IP & Holding GmbH|Fluid dispenser with zero displacement sealing device|
    CN111482326B|2020-05-12|2021-06-22|江苏高凯精密流体技术股份有限公司|Nozzle assembly and glue dispensing device adopting same|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    NL2021163A|NL2021163B1|2018-06-21|2018-06-21|Dispensing nozzle for a Coater|
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